ion beam services
The total ion implantation solution

 

Ihc for varian viision series

IHC for Varian VIISion series image

IBS offers a unique retrofit designed to help reducing costs on VIISion tools:

 

the conversion of a Dual Filament Bernas Source into an Indirect Heated Cathode (IHC).

 

● Double life time expectancy vs Bernas Source

● Pure hardware modification

No OEM software modification
(manual operations, autorun operations)

● Cost effectiveness:

● Lower gas consumption

● Improved beam current

● R.O.I. < 6 months

(based on IBS standard retrofit including 2 source kits + electronics + install program)

 

Register with Ion Beam

Get access to parts identifiers, technical publications and more.
Register now.

Already registered? Login here.

Telephone

+44 (0)1506 633 537

Speak with one of our team to answer any queries you have about our products or services.

view all

Featured products

  • FLIGHT TUBE, ULTRACLEAN product image

    Part no: 0040-94358

    FLIGHT TUBE, ULTRACLEAN PI9500/xR9500/xR200S The ION BEAM Services (IBS) Flight tube for Applied Materials ™ ION implanter… Details

  • FLIGHT TUBE ASSY, ULTRACLEAN product image

    Part no: 0040-94358

    FLIGHT TUBE ASSY, ULTRACLEAN PI9500/xR9500/xR200S The ION BEAM Services (IBS) Flight tube for Applied Materials ™ ION implanter… Details

  • FLIGHT TUBE W/DUMP, MARK II product image

    Part no: 0040-99171

    FLIGHT TUBE W/DUMP, MARK II xR80/xR120s The ION BEAM Services (IBS) Flight tube for Applied Materials ™ ION implanter… Details

  • ASSY,FLT TUBE W/DUMP, MARK II product image

    Part no: 0010-99078

    ASSY,FLT TUBE W/DUMP, MARK II Quantum/Quantum X The ION BEAM Services (IBS) Flight tube for Applied Materials ™ ION implanter… Details

  • FLIGHT TUBE W/DUMP, MARK II product image

    Part no: 0040-49800

    FLIGHT TUBE W/DUMP, MARK II Quantum/Quantum X The ION BEAM Services (IBS) Flight tube for Applied Materials ™ ION implanter… Details