Ihc for varian viision series

IHC for Varian VIISion series image

IBS offers a unique retrofit designed to help reducing costs on VIISion tools:


the conversion of a Dual Filament Bernas Source into an Indirect Heated Cathode (IHC).


Double life time expectancy vs Bernas Source

Pure hardware modification

No OEM software modification
(manual operations, autorun operations)

Cost effectiveness:

Lower gas consumption

Improved beam current

R.O.I. < 6 months

(based on IBS standard retrofit including 2 source kits + electronics + install program)