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IBS offers a unique retrofit designed to help reducing costs on VIISion tools:
the conversion of a Dual Filament Bernas Source into an Indirect Heated Cathode (IHC).
● Double life time expectancy vs Bernas Source
● Pure hardware modificationNo OEM software modification(manual operations, autorun operations)
● Cost effectiveness:
● Lower gas consumption
● Improved beam current
● R.O.I. < 6 months
(based on IBS standard retrofit including 2 source kits + electronics + install program)