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New esc test facility

New ESC Test Facility image

As part of the IBS ESC (Electro Static Clamps) refurbishment service, we have developed a new test system that allows the ESC to be fully tested after refurbishment under the conditions seen in a production environment, These in situ test are available for the following ESC; VIISta 200mm & 300mm, Varian E500 150mm & 200mm and Axcelis NV8250 150mm & 200mm.

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